BW-Series: White Light Interferometric Microscope System

• Accurate sub-nano-surface profiler with non-contact measurement

  Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefits Superior measurement performance

  • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
  • Enables measurements with the same height resolution in a wide range of magnifications.
  • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
  • Captures both an all-in-focus image and a surface height image.

  Wide range of observation methods

  • The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescenceobservations are all possible.

   

  Sub-nano-level measurement in a wide range of magnifications

  Type: BW-D501 system

  Subject: Silicon Carbide (SiC) Wafer

  

Sa 0.483nm 
0.645nm Sq 
Sz 7.460nm

Sa 0.302nm 
0.401nm Sq 
Sz 11.187nm

Sa 0.144nm 
0.545nm Sq 
Sz 121.859nm

Sa 0.391nm 
0.495nm Sq 
Sz 3.934nm

Sa 0.306nm 
0.398nm Sq 
Sz 3.264nm

Precise surface measurements for micrometer-range rough surfaces

Height calibration with the NIST-certified VLSI standard

BW-D501 system

Specifications: White Light Interferometric Microscope System